Apejuwe
Nikan Crystal Silicon Ingotis maa dagba bi ingot iyipo nla nipasẹ doping deede ati awọn imọ-ẹrọ fifa Czochralski CZ, aaye Oofa ti o fa Czochralski MCZ ati awọn ọna FZ Floating Zone.Ọna CZ jẹ lilo pupọ julọ fun idagbasoke ohun alumọni gara ti awọn ingots cylindrical nla ni awọn iwọn ila opin si 300mm ti a lo ninu ile-iṣẹ itanna lati ṣe awọn ẹrọ semikondokito.Ọna MCZ jẹ iyatọ ti ọna CZ ninu eyiti aaye oofa ti a ṣẹda nipasẹ itanna eletiriki, eyiti o le ṣaṣeyọri ifọkansi atẹgun kekere ni afiwe, ifọkansi aimọ kekere, yiyọkuro kekere ati iyatọ resistivity aṣọ.Ọna FZ ṣe iranlọwọ fun aṣeyọri ti resistance resistance giga ju 1000 Ω-cm ati gara-mimọ giga pẹlu akoonu atẹgun kekere.
Ifijiṣẹ
Nikan Crystal Silicon Ingot CZ, MCZ, FZ tabi FZ NTD pẹlu n-type tabi p-iru conductivity ni Western Minmetals (SC) Corporation le wa ni jišẹ ni iwọn ti 50mm, 75mm, 100mm, 125mm, 150mm ati 200mm opin (2, 3). , 4, 6 ati 8 inch), iṣalaye <100>, <110>, <111> pẹlu ilẹ dada ni package ti apo ṣiṣu inu pẹlu apoti paali ni ita, tabi bi sipesifikesonu adani lati de ojutu pipe.
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Imọ Specification
Nikan Crystal Silicon Ingot CZ, MCZ, FZ tabi FZ NTDpẹlu n-type tabi p-iru conductivity ni Western Minmetals (SC) Corporation le ti wa ni jišẹ ni iwọn 50mm, 75mm, 100mm, 125mm, 150mm ati 200mm opin (2, 3, 4, 6 ati 8 inch), iṣalaye <100 >, <110>, <111> pẹlu ilẹ dada ni package ti apo ṣiṣu inu pẹlu apoti paali ni ita, tabi bi sipesifikesonu adani lati de ojutu pipe.
Rara. | Awọn nkan | Standard Specification | |
1 | Iwọn | 2 ", 3", 4", 5", 6", 8 ", 9.5", 10", 12" | |
2 | Opin mm | 50.8-241.3, tabi bi beere | |
3 | Ọna idagbasoke | CZ, MCZ, FZ, FZ-NTD | |
4 | Iwa iwa | P-type / Boron doped, N-type / Phosphide doped tabi Un-doped | |
5 | Gigun mm | ≥180 tabi bi o ṣe nilo | |
6 | Iṣalaye | <100>, <110>, <111> | |
7 | Resistivity Ω-cm | Bi beere | |
8 | Erogba akoonu a/cm3 | ≤5E16 tabi bi o ṣe nilo | |
9 | Atẹgun Akoonu a/cm3 | ≤1E18 tabi bi o ṣe nilo | |
10 | Irin Kontaminesonu a/cm3 | <5E10 (Cu, Cr, Fe, Ni) tabi <3E10 (Al, Ca, Na, K, Zn) | |
11 | Iṣakojọpọ | Apo ṣiṣu inu, apoti itẹnu tabi apoti paali ni ita. |
Aami | Si |
Nọmba Atomiki | 14 |
Iwọn Atomiki | 28.09 |
Ẹka eroja | Metalloid |
Ẹgbẹ, Akoko, Àkọsílẹ | 14, 3, P |
Crystal be | Diamond |
Àwọ̀ | Grẹy dudu |
Ojuami Iyo | 1414°C, 1687.15 K |
Ojuami farabale | 3265°C, 3538.15 K |
Iwuwo ni 300K | 2.329 g / cm3 |
resistivity ojulowo | 3.2E5 Ω-cm |
Nọmba CAS | 7440-21-3 |
Nọmba EC | 231-130-8 |
Nikan Crystal Silicon Ingot, nigba ti o ba dagba patapata ati pe o ni ẹtọ resistivity, akoonu aimọ, pipe gara, iwọn ati iwuwo, ti wa ni ipilẹ nipa lilo awọn kẹkẹ diamond lati jẹ ki o jẹ silinda pipe si iwọn ila opin ọtun, lẹhinna gba ilana etching lati yọ awọn abawọn ẹrọ ti o fi silẹ nipasẹ ilana lilọ. .Lẹhinna ingot iyipo ti ge sinu awọn bulọọki pẹlu ipari kan, ati pe a fun ni ogbontarigi ati alapin akọkọ tabi alapin nipasẹ awọn ọna ṣiṣe mimu wafer adaṣe adaṣe fun titete lati ṣe idanimọ iṣalaye crystallographic ati adaṣe ṣaaju ilana bibẹ isalẹ wafer.
Awọn imọran rira
Nikan Crystal Silicon Ingot