Epitaxial (EPI) Silicon Wafer Featured Image

Epitaxial (EPI) Ohun alumọni Wafer

Apejuwe

Epitaxial Silicon Wafertabi EPI Silicon Wafer, jẹ wafer ti semiconducting crystal Layer ti a fi silẹ sori ilẹ gara didan ti sobusitireti ohun alumọni nipasẹ idagba epitaxial.Layer epitaxial le jẹ ohun elo kanna bi sobusitireti nipasẹ idagbasoke epitaxial isokan, tabi Layer nla kan pẹlu didara iwulo kan pato nipasẹ idagbasoke epitaxial orisirisi, eyiti o gba imọ-ẹrọ idagbasoke epitaxial pẹlu ifasilẹ orule kemikali CVD, ipele olomi epitaxy LPE, ati tan ina molikula. Epitaxy MBE lati ṣaṣeyọri didara ti o ga julọ ti iwuwo abawọn kekere ati aibikita dada ti o dara.Silicon Epitaxial Wafers ni a lo nipataki ni iṣelọpọ ti awọn ẹrọ semikondokito ti ilọsiwaju, awọn eroja semikondokito ICs ti o ga julọ, ọtọtọ ati awọn ẹrọ agbara, tun lo fun ipin diode ati transistor tabi sobusitireti fun IC gẹgẹbi iru bipolar, MOS ati awọn ẹrọ BiCMOS.Siwaju si, ọpọ Layer epitaxial ati fiimu nipọn EPI silikoni wafers ti wa ni igba lo ninu microelectronics, photonics ati photovoltaics ohun elo.

Ifijiṣẹ

Epitaxial Silicon Wafers tabi EPI Silicon Wafer ni Western Minmetals (SC) Corporation le funni ni iwọn 4, 5 ati 6 inch (100mm, 125mm, 150mm diamita), pẹlu iṣalaye <100>, <111>, epilayer resistivity of <1ohm -cm tabi soke to 150ohm-cm, ati epilayer sisanra ti <1um tabi soke si 150um, lati ni itẹlọrun awọn orisirisi awọn ibeere ni dada pari ti etched tabi LTO itọju, aba ti ni kasẹti pẹlu paali apoti ita, tabi bi adani sipesifikesonu si awọn pipe ojutu .

Ibeere ni bayi

Awọn alaye

Awọn afi

Imọ Specification

Epi Silicon Wafer

Epitaxial Silicon Waferstabi EPI Silicon Wafer ni Western Minmetals (SC) Corporation le funni ni iwọn 4, 5 ati 6 inch (100mm, 125mm, 150mm diamita), pẹlu iṣalaye <100>, <111>, resistivity epilayer ti <1ohm-cm tabi to 150ohm-cm, ati sisanra epilayer ti <1um tabi to 150um, lati ni itẹlọrun awọn ibeere oriṣiriṣi ni ipari dada ti etched tabi itọju LTO, ti o wa ninu kasẹti pẹlu apoti paali ni ita, tabi bi iyasọtọ ti adani si ojutu pipe.

Aami	Si
Nọmba Atomiki	14
Iwọn Atomiki	28.09
Ẹka eroja	Metalloid
Ẹgbẹ, Akoko, Àkọsílẹ	14, 3, P
Crystal be	Diamond
Àwọ̀	Grẹy dudu
Ojuami Iyo	1414°C, 1687.15 K
Ojuami farabale	3265°C, 3538.15 K
Iwuwo ni 300K	2.329 g / cm³
resistivity ojulowo	3.2E5 Ω-cm
Nọmba CAS	7440-21-3
Nọmba EC	231-130-8

Rara.	Awọn nkan	Standard Specification
1	Gbogbogbo Abuda
1-1	Iwọn	4"	5"	6"
1-2	Opin mm	100±0.5	125± 0.5	150± 0.5
1-3	Iṣalaye	<100>, <111>	<100>, <111>	<100>, <111>
2	Epitaxial Layer Abuda
2-1	Ọna idagbasoke	CVD	CVD	CVD
2-2	Iwa iwa	P tabi P+, N/ tabi N+	P tabi P+, N/ tabi N+	P tabi P+, N/ tabi N+
2-3	Sisanra μm	2.5-120	2.5-120	2.5-120
2-4	Isokan Sisanra	≤3%	≤3%	≤3%
2-5	Resistivity Ω-cm	0.1-50	0.1-50	0.1-50
2-6	Resistivity Iṣọkan	≤3%	≤5%	-
2-7	Dislocation cm-2	<10	<10	<10
2-8	Dada Didara	Ko si ërún, owusuwusu tabi osan Peeli ku, ati be be lo.
3	Mu sobusitireti Abuda
3-1	Ọna idagbasoke	CZ	CZ	CZ
3-2	Iwa iwa	P/N	P/N	P/N
3-3	Sisanra μm	525-675	525-675	525-675
3-4	Sisanra Iṣọkan max	3%	3%	3%
3-5	Resistivity Ω-cm	Bi beere	Bi beere	Bi beere
3-6	Resistivity Iṣọkan	5%	5%	5%
3-7	Iye ti o ga julọ ti TTV	10	10	10
3-8	Teriba μm max	30	30	30
3-9	Warp μm max	30	30	30
3-10	EPD cm-2 max	100	100	100
3-11	Profaili eti	Ti yika	Ti yika	Ti yika
3-12	Dada Didara	Ko si ërún, owusuwusu tabi osan Peeli ku, ati be be lo.
3-13	Pada Side Ipari	Etched tabi LTO (5000± 500Å)
4	Iṣakojọpọ	Kasẹti inu, apoti paali ita.

Silikoni Epitaxial WafersNi akọkọ ti a lo ni iṣelọpọ awọn ẹrọ semikondokito to ti ni ilọsiwaju, awọn eroja semikondokito ti irẹpọ pupọ ICs, ọtọ ati awọn ẹrọ agbara, tun lo fun ipin diode ati transistor tabi sobusitireti fun IC gẹgẹbi iru bipolar, MOS ati awọn ẹrọ BiCMOS.Siwaju si, ọpọ Layer epitaxial ati fiimu nipọn EPI silikoni wafers ti wa ni igba lo ninu microelectronics, photonics ati photovoltaics ohun elo.